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The Science and Engineering of Microelectronic Fabrication

Campbell, Stephen A.

The Science and Engineering of Microelectronic Fabrication - 2nd ed. - New Delhi: Oxford University Press, c 2007. - xiv. 603 p. : Fig, Tab ; 21 cm.

Includes bibliographical references and index

English

ISBN: 9780195681444

Dewey Class. No.: 621.38152 / C186s 2007

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International Islamic University Chittagong

The Science and Engineering of Microelectronic Fabrication