Campbell, Stephen A. <br/><br/>
The Science and Engineering of Microelectronic Fabrication   

 - 2nd ed. 
 - New Delhi:  Oxford University Press,  c 2007. 
 - xiv. 603 p. :  Fig, Tab ;  21 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><br/>English 
<br/><br/><label>ISBN: </label>9780195681444 
<br/><br/><label>Dewey Class. No.: </label>621.38152  / C186s 2007