TY  - BOOK
AU  - Campbell, Stephen A.
TI  - The Science and Engineering of Microelectronic Fabrication
SN  - 9780195681444
U1  - 621.38152 23
PY  - 2001///
CY  - New Delhi
PB  - Oxford University Press
KW  - Bangladesh
N1  - Includes Index
ER  -