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	1.		No cover image available THe Sciene and Engineering of Microelectronic Fabrication by Campbell, Stephen A Material type: Text; Format: print ; Literary form: Not fiction Publication details: New york Oxford University Press Indian Ed.2007 Availability: Items available for loan: IIUC Central Library (1)Call number: 621.38152/C191s. Place hold Add to cart (remove)
	2.		The Science and Engineering of Microelectronic Fabrication by Campbell, Stephen A Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: New Delhi: Oxford University Press, c 2007 Availability: Items available for loan: IIUC Central Library (9)Call number: 621.38152 C186s 2007, ... Items available for reference: IIUC Central Library: Not for loan (5)Call number: 621.38152 C186s 2007, ... Place hold Add to cart (remove)
	3.		The Science and Engineering of Microelectronic Fabrication by Campbell, Stephen A Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Language: English Publication details: New Delhi: Oxford University Press, c 2001 Availability: Items available for reference: IIUC Central Library: Not for loan (3)Call number: 621.38152 C186s 2001, ... Add to cart (remove)