| 000 | 00659nam a22002177a 4500 | ||
|---|---|---|---|
| 999 |
_c18070 _d18070 |
||
| 003 | BD-ChIIU | ||
| 005 | 20190126201336.0 | ||
| 008 | 190126b2007 ii ||||| |||| 00| 0 eng d | ||
| 020 | _a9780195681444 | ||
| 040 |
_aDLC _cBD-ChIIU _dBD-ChIIU |
||
| 082 |
_223 _a621.38152 _bC186s 2007 |
||
| 100 | _aCampbell, Stephen A. | ||
| 245 | _aThe Science and Engineering of Microelectronic Fabrication | ||
| 250 | _a2nd ed. | ||
| 260 |
_aNew Delhi: _bOxford University Press, _cc 2007. |
||
| 300 |
_axiv. 603 p. : _bFig, Tab ; _c21 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 546 | _aEnglish | ||
| 590 | _6Abdur Rahman | ||
| 942 |
_2ddc _cBK |
||