000			01334cam a2200337 a 4500
999			_c18114 _d18114
001			3470762
003			BD-ChIIU
005			20220614020002.0
008			931007s1994 nyua b 001 0 eng
010			_a 93040716
020			_a0471580058 (alk. paper)
040			_aDLC _cBD-ChIIU _dBD-ChIIU
050	0	0	_aTK7874 _b.G473 1994
082	0	0	_a621.38152 _223 _bG411v 2005
100	1		_aGhandhi, Sorab Khushro, _d1928-
245	1	0	_aVLSI fabrication principles : _bsilicon and gallium arsenide / _cSorab K. Ghandhi.
250			_a2nd ed.
260			_aNew York : _bWiley, _cc1994.
300			_axxiv, 834 p. : _bill. ; _c25 cm.
500			_a"A Wiley-Interscience publication."
504			_aIncludes bibliographical references and index.
650		0	_aIntegrated circuits _xVery large scale integration.
650		0	_aSilicon.
650		0	_aGallium arsenide.
740	0		_aVery large scale integration fabrication principles.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/93040716.html
856	4		_3Table of Contents _uhttp://www.loc.gov/catdir/toc/onix05/93040716.html
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
942			_2ddc _cBK _02