000			00677nam a22002417a 4500
999			_c18143 _d18143
003			BD-ChIIU
005			20190212174701.0
008			190212b2001 ii ||||| |||| 00| 0 eng d
020			_a9780195681444
040			_aDLC _cBD-ChIIU _dBD-ChIIU
041			_aEnglish
082			_223 _a621.38152 _bC186s 2001
100			_aCampbell, Stephen A.
245			_aThe Science and Engineering of Microelectronic Fabrication
250			_a2nd ed.
260			_aNew Delhi: _bOxford University Press, _cc 2001.
300			_axiv,603 p. : _bTab, FIg ; _c21 cm.
500			_aIncludes Index.
546			_aEnglish
590			_6Abdur Rahman
651			_aBangladesh
942			_2ddc _cBK